Hydrogen Fluoride (HF)

CAS Number: 7664-39-3
Hydrogen fluoride (HF) is a colorless, highly toxic gas or fuming liquid with a sharp, acrid odor. It is widely used in petroleum refining (alkylation units), semiconductor and electronics manufacturing (silicon wafer etching), glass and metal etching, fluorine chemistry, and the production of refrigerants and pharmaceuticals. HF is unique among corrosive acids because it penetrates deeply into tissue before producing symptoms — skin contact may cause little immediate pain while fluoride ions diffuse inward, causing severe, delayed tissue destruction and systemic toxicity. Systemic absorption of sufficient amounts can cause life-threatening hypocalcemia, hypomagnesemia, and cardiac arrhythmias. Inhalation of HF vapor causes severe respiratory tract damage, pulmonary edema, and can be rapidly fatal at high concentrations. Workers in petroleum refining, semiconductor fabrication, chemical manufacturing, and metal treatment operations face the greatest occupational exposure risk.
Hydrogen fluoride (HF) is one of the most hazardous gases in industrial use as it penetrates tissue deeply and can cause life-threatening systemic toxicity even from exposures that initially seem minor. Rent HF detection equipment from RAECO Rents for petroleum refining alkylation units, semiconductor and electronics manufacturing, metal etching operations, and chemical processing facilities. Because HF sensors are known for cross-sensitivity issues and short service life, RAECO Rents bump tests and span calibrates every gas monitor on the day of shipment so you can trust the reading before the meter leaves its case. Our technical team can help confirm the right sensor chemistry, detection range, and other critical parameters for your specific application, with fast turnaround and phone support so your crew is never waiting on equipment when conditions matter most.

Regulatory Exposure Limits

Updated on May 21, 2026

OSHA PEL
TWA: 3 ppm (2 mg/m³)
STEL: N/A
C: N/A
NIOSH REL
TWA: 3 ppm (2 mg/m³)
STEL: N/A
C: 6 ppm (5 mg/m³)
IDLH: 30 ppm
ACGIH TLV
TWA: 0.5 ppm
STEL: N/A
C: 2 ppm
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