Hydrides Chemcassette for SPM Flex

Gas Monitor Consumable Manufacturer: Honeywell RAE Systems
Hydrides Chemcassette for SPM Flex
Hydrides Chemcassette for SPM Flex
Hydrides Chemcassette for SPM Flex

Lead Time Required: This product requires 30 days lead time. Please plan accordingly when placing your order.

Honeywell ChemCassette for hydride gas detection with the SPM Flex fixed-point gas monitor. Monitors ultra-low concentrations for semiconductor manufacturing and industrial safety applications. Swap the cassette and select the target gas from the SPM Flex LCD menu.

Detectable Gases: Arsine, phosphine, diborane, silane, germane, hydrogen selenide, and hydrogen sulfide.

Compatibility: Honeywell SPM Flex only. Quantity: 1 cassette per box. Available Formats: 14-Day (P/N: 1265-4000) and 90-Day (P/N: 1265-3000).

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Exposure Hazards This Equipment Detects

Hydrogen Sulfide (H₂S)

CAS: 7783-06-4
Learn More
Updated on March 17, 2026
PEL TWA
N/A
REL TWA
N/A
TLV TWA
1 ppm [2009]

Equipment Specifications

Component Role: Consumable Chemcassette tape for the SPM Flex — determines which gases the monitor detects. Swap the cassette and select the target gas from the SPM Flex LCD menu
Detection Method / Sensor Type: Chemcassette colorimetric tape
Target Gas/Analyte: Hydrides — arsine (AsH3), phosphine (PH3), diborane (B2H6), silane (SiH4), germane (GeH4), hydrogen selenide (H2Se) and hydrogen sulphide (H2S)
Measurement Range: Arsine: 0.5 to 500 ppb. Phosphine: 3 to 3,000 ppb. Diborane: 5 to 1,000 ppb. Silane: 0.03 to 50 ppm. Germane: 50 to 2,000 ppb. Hydrogen selenide: 2 to 500 ppb. Hydrogen sulphide: 0.001 to 9.999 ppm
Relative Humidity Range: Optimum for best accuracy varies by gas — arsine 10-70%, phosphine and diborane 30-70%, silane 34-50%, germane 40-50%, hydrogen selenide 10-60%, hydrogen sulphide 10-75% RH
Response Time: T50 at twice TLV — phosphine 6 s, hydrogen sulphide 7 s, silane 13 s, diborane and hydrogen selenide 14 s, arsine 55 s, germane 245 s
Resolution: Lowest alarm level — arsine 1 ppb, phosphine 5 ppb, diborane 10 ppb, silane 0.05 ppm, germane 100 ppb, hydrogen selenide 5 ppb, hydrogen sulphide 0.005 ppm
Additional Features: Sample line particulates filter type A required. Detects ultra-low ppb concentrations across most gases in the family
Sample Range / Line Length: Maximum sample line 30 m
Compatible Instruments: Honeywell SPM Flex
Operating Temperature Range: 32°F to 104°F (0°C to 40°C)
Shelf / Storage Life: 14-day format (P/N 1265-4000) and 90-day format (P/N 1265-3000); 90 allowable days after first use; 1 cassette per box
Intended Use: Semiconductor manufacturing and industrial safety

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