Hydrides Chemcassette for SPM Flex

Gas Monitor Consumable Manufacturer: Honeywell RAE Systems
Hydrides Chemcassette for SPM Flex
Hydrides Chemcassette for SPM Flex
Hydrides Chemcassette for SPM Flex

Lead Time Required: This product requires 30 days lead time. Please plan accordingly when placing your order.

Honeywell ChemCassette for hydride gas detection with the SPM Flex fixed-point gas monitor. Monitors ultra-low concentrations for semiconductor manufacturing and industrial safety applications. Swap the cassette and select the target gas from the SPM Flex LCD menu.

Detectable Gases: Arsine, phosphine, diborane, silane, germane, hydrogen selenide, and hydrogen sulfide.

Compatibility: Honeywell SPM Flex only. Quantity: 1 cassette per box. Available Formats: 14-Day (P/N: 1265-4000) and 90-Day (P/N: 1265-3000).

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Hydrides Chemcassette for SPM Flex
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About This Product

Honeywell ChemCassette for hydride gas detection with the SPM Flex fixed-point gas monitor. Monitors ultra-low concentrations for semiconductor manufacturing and industrial safety applications. Swap the cassette and select the target gas from the SPM Flex LCD menu.

Detectable Gases: Arsine, phosphine, diborane, silane, germane, hydrogen selenide, and hydrogen sulfide.

Compatibility: Honeywell SPM Flex only. Quantity: 1 cassette per box. Available Formats: 14-Day (P/N: 1265-4000) and 90-Day (P/N: 1265-3000).

Exposure Hazards This Equipment Detects

Hydrogen Sulfide (H₂S)

CAS: 7783-06-4
Learn More
PEL TWA
N/A
REL TWA
N/A
TLV TWA
1 ppm [2009]

Equipment Specifications

Hydrides Chemcassette

Optimum Temperature:0–35°C (32–95°F) |Sampling Flow Rate:500 cc/min ±10% |Humidity Range:15–75% RH (varies by gas) |Max Sample Tubing:5 meters (16 ft)

GasDetection RangeTLVLALAlarm SetpointsResponse Time (T50)Arsine (AsH₃)0.5–500 ppb5 ppb1 ppb2.5 ppb / 5 ppb55 secPhosphine (PH₃)3–3000 ppb300 ppb5 ppb150 ppb / 300 ppb6 secDiborane (B₂H₆)5–1000 ppb100 ppb10 ppb50 ppb / 100 ppb14 secSilane (SiH₄)0.03–50 ppm5 ppm0.05 ppm2.5 ppm / 5 ppm13 secGermane (GeH₄)50–2000 ppb200 ppb100 ppb100 ppb / 200 ppb245 secHydrogen Selenide (H₂Se)2–500 ppb50 ppb5 ppb25 ppb / 50 ppb14 secHydrogen Sulfide (H₂S)0.001–9.999 ppm1 ppm0.005 ppm0.5 ppm / 1 ppm7 sec

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